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Probe Tip Measurement
 | Programmable X, Y & Z axes |
| Programmable 12:1 Zoom Optics |
| Programmable Lighting: Coaxial Brightfield
illumination, ring light, transmitted substage illumination and
incident light |
| Automatic report generation |
| Field-of-View measurements |
| Stage-based measurements |
| Auto Focus |
| Stage travel from 4" to 12" |
| XY Stage resolution: 0.5 micron |
| Z-axis resolution: 0.1 micron |
| Magnification range: 200X - 2400X |
| Joystick control |
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Sertek’s Model ST2000 3D Probe Tip Measurement System offers high
accuracy, fully automated, 3D non-contact measurement of all
critical probe card dimensions including:
| Tip Diameter |
| Tip Length |
| Tip Depth |
| Coplanarity |
| XY Position |
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The ST2000 utilizes high resolution zoom optics combined with a
state-of-the-art video capture device to provide real-time, crisp,
detailed images. Our 12:1 zoom system allows the user to see
several probe tips in one field of view or, zoom up to high
magnification and see more detail for greater measurement accuracy. |
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The ST2000 is equipped with programmable Brightfield
"vertical" illumination and Darkfield "ringlight" illumination.
The system can be expanded up to 4 programmable illuminators for
special applications.
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The "Perfect Focus" tool allows you to see several probes at
once with everything within the field of view in focus. This is done
by capturing several "slices" of the probe then, combining them into
one image. |
Another powerful tool for documentation purposes is the Auto
Mosaic tool which allows the user to capture images of all the
probe tips then, stitch them together into one image.
Auto Mosaic image sizes are limited only by computer memory. The
operator is able to create a high resolution mosaic of the entire
probe card as shown left.
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Measurements can be taken either manually or in the fully automated
mode. The ST2000 offers several measurement tools for measuring tip
diameter. For example, measuring the equivalent diameter of a thresholded
object using the Histogram tool produces an accurate, highly repeatable
diameter of the tip area that will make contact with the wafer.
Other tools for measuring tip diameter include the Digital Caliper
tool as shown above, the Auto Circle tool which uses Edge Detection
and, the Best Fit Circle tool which allows the user to pick 3 or
more points on the probe tip perimeter to get the resulting diameter.
Tip Length is measured by auto-focusing on the probe tip, then the
bend. Utilizing a 0.1 micron linear encoder on the Z-axis and a 1.6 micron
depth of field infinity corrected objective, the ST2000 is able to measure
Tip Length and Tip Depth with an accuracy of +/-2.5 microns.
| The ST2000 can also be
used to measure probe tip misalignment... |
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or, the "scrub mark"
area on the wafer pad. |
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