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DC servo motors directly coupled to 2mm pitch leadscrews and 1
micron resolution rotary encoders for closed loop X-Y control |
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Direct-drive 24V motors (for advanced
controller) or gear-reduction 12V motors (for standard controller) |
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Thin cross-section (0.96 to 1.6") allows stage
to work with most microscopes including Meiji, Leica, Mitutoyo,
Nilon, Olympus and Zeiss |
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Large variety of accessories for mask and
wafer inspection |
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Rigid and durable proprietary KORE-FRAME
design directly links X and Y axes in single piece of metal,
providing excellent squareness, flatness and precision |
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Stainless steel precision leadscrews with
anti-backlash nut provide fine resolution and accurate control |
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Linear accuracy, flatness, and straightness
better than 1 in 3000 |
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Roller bearing slide mechanism made from
single piece hardened alloy steel uses cross-roller bearings for
extra precision and rigidity |