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Individual X and Y leadscrew controls for fine
movement and quick-release handles for rapid positioning |
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Available with 1 or 0.5 micron resolution
linear encoders |
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Thin cross-section (0.96" to 1.6")allows stage
to work with most microscopes including Meiji, Leica, Mitutoyo,
Nilon, Olympus and Zeiss |
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Large variety of accessories for mask and
wafer inspection |
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Rigid and durable proprietary KORE-FRAME
design directly links X and Y axes in single piece of metal,
providing excellent squareness, flatness and precision |
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Linear accuracy calibrated to less than 1
micron error in 5000; flatness and straightness of travel better
than 1 in 5000 |
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Stainless steel leadscrews with anti-backlash nut provide fine
resolution and accurate control |
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Roller bearing slide mechanism made from
single piece hardened alloy steel uses cross-roller bearings for
extra precision and rigidity |
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2-axis digital readout with large LED display
and RS232 serial interface included |