Available with 5 or 1 micron resolution linear encoders

Thin cross-section (0.96" to 1.17")allows stage to work with most microscopes including Meiji, Leica, Mitutoyo, Nilon, Olympus and Zeiss

Large variety of accessories for mask and wafer inspection

Rigid and durable proprietary KORE-FRAME design directly links X and Y axes in single piece of metal, providing excellent squareness, flatness and precision

Linear accuracy calibrated to less than 1 micron error in 5000; flatness and straightness of travel better than 1 in 5000

Unique and hardened steel friction drive for backlash-free operation prevents damage even when forced against the end-stops

Proven to outperform and last much longer than other systems

Roller bearing slide mechanism made from single piece hardened alloy steel uses cross-roller bearings for extra precision and rigidity

2-axis digital readout with large LED display and RS232 serial interface included